Skip to main content

ALFE Inaugurates CO2 Recovery Unit, Enhancing Production Capacity of Electronic-Grade Gases to Support Advanced Semiconductor Manufacturing Processes

Published on June 25, 2024

2 minutes

Air Liquide Far Eastern(ALFE) inaugurated the CO2 recovery unit in Taoyuan Guanyin Site on June 24th. We are honored to have Rui COELHO, Vice President of Air Liquide Great China Cluster, Peter Hsu, Chairman of ALFE, Emile M. P. CHANG, CEO of Invest Taiwan, Franck Paris, Director of French Office in Taipei, Chang San-cheng, Mayor of Taoyuan City and other valuable guests to witness this meaningful moment with us.     

At the Guanyin Plant, ALFE produces electronic-grade hydrogen with a high purity (of over 99.9995%). The CO2 recovery unit will increase its current production of high-purity hydrogen by approximately 20% and recover more than 90% of the carbon dioxide resulting from the production process. This carbon dioxide will then be purified to meet the electronic-grade standard and supplied for advanced semiconductor manufacturing processes.This more efficient process provides high-quality products for semiconductor customers' advanced processes, fulfilling ALFE's carbon reduction commitment by optimizing process efficiency.



Olivier Letessier, President of ALFE, stated, "As a global leader in industrial gases and a long-term partner of the semiconductor industry, ALFE is committed to continuously introducing innovative technologies that enhance production efficiency, and achieve better resource utilization. The commissioning of this CO2 recovery unit is one such enhancement, adding reliability and stability to our supply of high-purity hydrogen and carbon dioxide with a lower carbon footprint."